Summary
Overview
Work History
Education
Skills
Languages
Timeline
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Lezhong Gao

Ballston Spa

Summary

Holding dual master's degrees in Computer Science from Georgia Institute of Technology and Mechanical Engineering from Northeastern University, I currently apply my expertise at GLOBALFOUNDRIES as a Sr Litho Process Engineer, a role I've excelled in for over four years. With a strong foundation in engineering mechanics from Central South University, my competencies in programming languages such as C, Python, and Matlab enable me to innovate in metrology and lithography processes. Previously, I contributed significantly as an AME Metrology Engineer, boosting operational efficiency and precision. Our team thrives on collaborative efforts to push the boundaries of semiconductor technology.

Overview

6
6
years of professional experience

Work History

Sr Lithography Process Engineer

GLOBALFOUNDRIES
11.2020 - Current
  • Authored and designed Standard Operating Procedures (SOPs) and ECAPs for lithography processes in a web-based system, covering tool faults, process errors, and new process introductions.
  • Qualified new materials (bottom coating, photoresist, top coating,solvents) to enhance yield and reduce defects.
  • Collaborated with equipment teams to optimize coating/development recipes, reducing wafer defectivity by 20%
  • Designed/executed DOE experiments to optimize track/scanner recipes, improving throughput by 6%
  • Developed scanner recipes (focus, exposure energy, alignment strategies) for specific products, achieving target CD uniformity of customer requirement and reducing rework rate by 50% on some trouble process levels.
  • Built Python scripts to automate process monitoring playbooks, reduce MTTD by 20% on my duties.
  • Partnered with software engineers to develop real-time dashboards for process/equipment data tracking, enabling faster issue resolution.
  • Qualified coating materials with reduced shot size, saving over $400k per year for the module.
  • Qualified and implemented a new ASML function on all scanners, saving %750k per year for the module
  • Resolved a 2-year-old pre-alignment issue on scanners by analyzing data and optimizing track recipes, improve 3% tool capacity by eliminating tool down time.
  • Implemented SPC (Statistical Process Control) and advanced process control (APC) functions to improve MTTD and process stability.
  • Performed routine track/scanner qualifications on bare wafers, troubleshooting deviations in pattern dimension, defects, and particle introduced.

AME Metrology Engineer

GLOBALFOUNDRIES
10.2019 - 10.2020
  • Monitored and improved shift teams' KPIs(throughput, remeasure rate etc) through targeted training and real-time feedback
  • Resolved lot-based CDSEM measurement issues via recipe optimization, improving measure accuracy per process team requested
  • developed and qualified CDSEM recipes (AMAT and Hitachi toolsets) for new products, ensuring alignment with design specs and process changes
  • collaborated with integration/lithograph/etch teams to troubleshoot measurement issues in cross-module experiments, enabling faster root-cause analysis

Education

Master of Science - Computer Science

Georgia Institute of Technology
Atlanta, GA
08-2023

Master of Science - Mechanical Engineering

Northeastern University
Boston,MA
05-2019

Bachelor of Science - Civil Engineering

Central South University
China
06-2016

Skills

  • Data analysis
  • Process development
  • Team collaboration
  • Production planning
  • Process validation
  • Project management
  • Root-cause analysis
  • Python, Java, C
  • Matlab, JMP, SPACE(SPC)

Languages

English
Professional Working
Chinese (Mandarin)
Native or Bilingual

Timeline

Sr Lithography Process Engineer

GLOBALFOUNDRIES
11.2020 - Current

AME Metrology Engineer

GLOBALFOUNDRIES
10.2019 - 10.2020

Master of Science - Computer Science

Georgia Institute of Technology

Master of Science - Mechanical Engineering

Northeastern University

Bachelor of Science - Civil Engineering

Central South University

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Lezhong Gao